One important parameter that is often not considered in the formation of laser-induced periodic surface structures (LIPSS) is the laser-induced oxidation produced when oxidation prone materials are irradiated in air environment. In this work, we characterize the response of the oxidation prone hard-coating material chromium nitride and explain the findings with finite-difference time-domain calculations. We also employ complementary surface and in-depth analytic techniques to reveal morphological, chemical and structural features of different types of surface structures and LIPSS produced on titanium-based substrates.
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