Corning has developed a number of manufacturing and test techniques to meet the challenging requirements of imaging hyperspectral optical systems. These processes have been developed for applications in the short-wave visible through long-wave IR wavelengths. Optical designs for these imaging systems are typically Offner or Dyson configurations, where the critical optical components are powered gratings and slits. Precision alignment, system athermalization, and harsh environmental requirements, for these systems drive system level performance and production viability.
This paper will present the results of these techniques including all aluminum gratings and slits, innovative grating profiles, snap together self-aligning mechanical designs, and visible test techniques for IR systems.
We report on the design, fabrication, and on-sky performance of the Florida Image Slicer for Infrared Cosmology and Astrophysics (FISICA) - a fully-cryogenic all-reflective image-slicing integral field unit for the FLAMINGOS near-infrared spectrograph. Designed to accept input beams near f/15, FISICA with FLAMINGOS provides R~1300 spectra over a 16x33-arcsec field-of-view on the Cassegrain f/15 focus of the KPNO 4-meter telescope, or a 6x12-arcsec field-of-view on the Nasmyth or Bent Cassegrain foci of the Gran Telescopio Canarias 10.4-meter telescope. FISICA accomplishes this using three sets of "monolithic" powered mirror arrays, each with 22 mirrored surfaces cut into a single piece of aluminum. We review the optical and opto-mechanical design and fabrication of FISICA, as well as laboratory test results for FISICA integrated with the FLAMINGOS instrument. Finally, we present performance results from observations with FISICA at the KPNO 4-m telescope and comparisons of FISICA performance to other available IFUs on 4-m to 8-m-class telescopes.
We report on the design and status of the Florida Image Slicer for Infrared Cosmology and Astrophysics (FISICA) - a fully-cryogenic all-reflective image-slicing integral field unit for the FLAMINGOS near-infrared spectrograph. Designed to accept input beams near f/15, FISICA with FLAMINGOS provides R~1300 spectra over a 16x33-arcsec field-of-view on the Cassegrain f/15 focus of the KPNO 4-meter telescope, or a 6x12-arcsec field-of-view on the Nasmyth or Bent Cassegrain foci of the Gran Telescopio Canarias 10.4-meter telescope. FISICA accomplishes this using three sets of “monolithic” powered mirror arrays, each with 22 mirrored surfaces cut into a single piece of aluminum. We review the optical and opto-mechanical design and fabrication of FISICA, as well as laboratory test results for FISICA integrated with the FLAMINGOS instrument. We also discuss plans for first-light observations on the KPNO 4-meter telescope in July 2004.
We discuss the design, fabrication, assembly, and testing of the prototype Florida Image Slicer for Infrared Cosmology and Astrophysics (FISICA) Integral Field Unit (IFU). FISICA is intended for large telescopes with f/numbers close to f/15, such as the KPNO 4-m and GTC 10.4-m telescopes. It implements an image slicing approach, wherein the initial image plane is optically sliced into thin strips and the strips are optically rearranged end-to-end, whereupon the composite slit image is fed into a conventional spectrograph. We divide the field of view into 22 slices, while accommodating the entire f/15 viewing solid angle. The all-reflective instrument resides in a cryogenic dewar at the initial focal plane, and places the composite slit image output precisely at the initial focus, allowing it to interface to the existing FLAMINGOS spectrograph. The mirrors were diamond turned using various tool geometries and state-of-the-art, multi-axis tool control. The mirrors are made from a single billet of aluminum, and the optical bench and mounts are made of the same alloy as the mirrors for optimum performance during cryogenic cooling. We discuss the key design efforts, emphasizing tradeoffs among performance, volume, fabrication difficulty, and alignment requirements. We describe the fabrication, and present preliminary laboratory test results.
The implementation of 193nm laser lithography for IC manufacturing is partially dependent on establishing energy efficient laser beam delivery systems of 'beamlines' in wafer steppers and other lithography and metrology tools. The objective of this work is to study the parameters that most critically impact 193nm UV energy efficiency, specifically the elimination of ozone from the beampath by providing an inert gas positive pressure ambient around the laser optics, and the use of 193nm optimized mirrors for beam delivery. An experimental 193nm laser beamline was set up with an ozone monitor and several UV detectors used throughout the optical system. 193nm-optimized laser mirrors were tested in comparison with standard laser mirrors. Three different inert gases were introduced and at various pressures while firing the laser at 50 Hz, 100 Hz, and 200 Hz reprates. Laser pulse energies are reported under these varying conditions as a function of ozone concentration. Overall laser beamline energy transmission is given as a function of laser mirror type.
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