Dr. Shigeo Yasuhara
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 11 April 2024 Presentation
Satoru Kaneko, Takashi Tokumasu, Daishi Shiojiri, Manabu Yasui, Masahito Kurouchi, Masahiko Mitsuhashi, Chihiro Kato, Satomi Tanaka, Shigeo Yasuhara, Musa Can, Ruei-Sung Yu, Sumanta Shaoo, Kripasindhu Sardar, Masahiro Yoshimura, Akifumi Matsuda, Mamoru Yoshimoto
Proceedings Volume PC12939, PC129390I (2024) https://doi.org/10.1117/12.3000129
KEYWORDS: Oxides, Silicon, Graphene, Semiconductors, Dielectrics, Chemical vapor deposition, Thermal stability, Carbon dioxide, Thermodynamics, Silicon carbide

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