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Shiwei Song
at A*STAR Institute of Microelectronics
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Publications (1)
Proceedings Article | 5 March 2021 Presentation + Paper
Photonic crystal MEMS emitter for chemical gas sensing
Nanxi Li, Qin Chao, Zhonghua Gu, Shiwei Song, Yanyan Zhou, Shaonan Zheng, Linfang Xu, Yun Da Chua, Qingxin Zhang, Hong Cai, Daohua Zhang, Qi Jie Wang, Lennon Lee
Proceedings Volume 11697, 116970M (2021) https://doi.org/10.1117/12.2581358
KEYWORDS: Photonic crystals, Industrial chemicals, Biological and chemical sensing, Microelectromechanical systems, Mid-IR, Thermal sensing, Silicon, Sensing systems, Optical sensors, Process control
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