Mr. Shunpei Kawai Profile

Shunpei Kawai

at Hokkaido Univ

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Publications (1)

Proceedings Article | 23 March 2020 Presentation + Paper

Sensitivity enhancement of chemically amplified EUV resist by adding diphenyl sulfone derivatives

Kazumasa Okamoto, Shunpei Kawai, Takahiro Kozawa

Proceedings Volume 11326, 113260D (2020) https://doi.org/10.1117/12.2551865

KEYWORDS: Extreme ultraviolet, Extreme ultraviolet lithography, Electron beam lithography, Polymers, Lithography, Line width roughness, FT-IR spectroscopy, Ionization

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