We investigate circular grating resonators (CGR) with a very small footprint. Photonic devices based on circular
grating resonators are computationally designed, optimized and studied in their functionality using finite
difference time-domain (FDTD) method. A wide variety of critical quantities such as transmission and reflection,
resonant modes, resonant frequencies, and field patterns are calculated. Due to their computational size some
of these calculations have to be performed on a supercomputer (e.g. parallel Blue Gene machine). The devices
are fabricated in SOI using the computational design parameters. First they are defined by electron-beam
lithography. Then the pattern transfer is achieved by an inductively coupled reactive-ion etch process. Finally,
the devices are characterized by coupling light from a tunable laser with a tapered lensed fiber. As predicted
from the simulations the measured transmission spectra exhibit a wide range of different type of resonances with
quality factors exceeding 1000.
Circular grating resonators could lead to the development of very advanced silicon-on-insulator (SOI) based
nano-photonic devices clearly beyond state of the art in terms of functionality, size, speed, cost, and integration
density. The photonic devices based on the circular grating resonators are computationally designed and studied
in their functionality using finite-difference time-domain (FDTD) method. A wide variety of critical quantities
such as transmission and field patterns are calculated.
Due to their computational size some of these calculations have to be performed on a supercomputer like a
massive parallel Blue Gene machine. Using the computational design parameters the devices are fabricated on
SOI substrates consisting of a buried oxide layer and a 340-nm-thick device layer. The devices are defined by
electron-beam lithography and the pattern transfer is achieved in a inductively coupled reactive-ion etch process.
Then the devices are characterized by coupling light in from a tunable laser with a lensed fiber. As predicted
the measured transmission spectra exhibit a wide range of different type of resonances with Q-factors over 1000
which compares very well with the computations.
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