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Soraya Zangenehzadeh
at Institute of High Frequency Technology
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Publications (1)
Proceedings Article | 7 August 2023 Poster
Ellipsometer development for process monitoring
Emil Agocs, Soraya Zangenehzadeh, Axel Günther, Hans-Hermann Johannes, Bernhard Roth, Wolfgang Kowalsky
Proceedings Volume 12624, 126241M (2023) https://doi.org/10.1117/12.2680286
KEYWORDS: Quality control, Manufacturing, Time metrology, Thin films, Thin film devices, Spectroscopes, Precision optics, Polarizers, Optics manufacturing, Optical signal processing
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