Mr. Thilo Schmidt Profile

Thilo Schmidt

at Univ Siegen

SPIE Involvement:

Author

Publications (13)

Proceedings Article | 12 March 2024 Presentation + Paper

Investigating the treatment point of plants for laser weeding

Lorenz Lünsmann, Matthias Lautenschläger, Thilo Schmidt, Tammo Ripken, Merve Wollweber

Proceedings Volume 12879, 1287905 (2024) https://doi.org/10.1117/12.3005322

KEYWORDS: Laser irradiation, Fiber lasers, Thermal imaging cameras, Beam diameter

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Proceedings Article | 15 February 2011 Paper

MEMS product engineering: methodology and tools

Dirk Ortloff, Jens Popp, Thilo Schmidt, Kai Hahn, Matthias Mielke, Rainer Brück

Proceedings Volume 7926, 79260D (2011) https://doi.org/10.1117/12.876104

KEYWORDS: Microelectromechanical systems, Manufacturing, 3D modeling, Product engineering, Computer aided design, Excel, Instrument modeling, Data acquisition, Prototyping, Data modeling

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Proceedings Article | 31 March 2010 Paper

Comprehensive design and process flow configuration for micro and nano tech devices

Kai Hahn, Thilo Schmidt, Matthias Mielke, Dirk Ortloff, Jens Popp, Rainer Brück

Proceedings Volume 7646, 76461F (2010) https://doi.org/10.1117/12.847583

KEYWORDS: Product engineering, Molecular nanotechnology, Computer aided design, Microelectromechanical systems, Manufacturing, Software development, 3D modeling, Instrument modeling, Process engineering, Virtual colonoscopy

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Proceedings Article | 21 August 2009 Paper

Environment for thin-film manufacturing process development for product engineering of micro and nano devices

Dirk Ortloff, Kai Hahn, Jens Popp, Thilo Schmidt, Rainer Brück

Proceedings Volume 7402, 74020N (2009) https://doi.org/10.1117/12.825606

KEYWORDS: Product engineering, Molecular nanotechnology, Manufacturing, Microelectromechanical systems, Custom fabrication, Fabrication, Process engineering, Data processing, CMOS technology, Control systems

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Proceedings Article | 30 December 2008 Paper

MEMS product engineering using fabrication process development tools

K. Hahn, T. Schmidt, D. Ortloff, J. Popp, A. Wagener, R. Brück

Proceedings Volume 7269, 72690W (2008) https://doi.org/10.1117/12.807705

KEYWORDS: Microelectromechanical systems, Product engineering, Manufacturing, Computer aided design, Data modeling, Environmental management, Process engineering, Data processing, Custom fabrication, Interfaces

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Proceedings Article | 7 March 2007 Paper

Verification of thin film processes in a virtual fabrication environment

T. Schmidt, D. Ortloff, J. Popp, K. Hahn, R. Brück, A. Hössinger

Proceedings Volume 6462, 64620G (2007) https://doi.org/10.1117/12.700379

KEYWORDS: Microelectromechanical systems, Virtual reality, Materials processing, Thin films, Device simulation, 3D modeling, Prototyping, Etching, Manufacturing, Data processing

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Proceedings Article | 20 December 2006 Paper

Optimization of MEMS fabrication process design by virtual experiments

T. Schmidt, K. Hahn, T. Binder, J. Popp, A. Wagener, R. Brück

Proceedings Volume 6415, 64150R (2006) https://doi.org/10.1117/12.695427

KEYWORDS: Microelectromechanical systems, Materials processing, TCAD, 3D modeling, Manufacturing, Device simulation, Microelectronics, Prototyping, Process modeling, Photomasks

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Proceedings Article | 21 April 2006 Paper

Management and verification for MEMS fabrication processes

T. Schmidt, D. Ortloff, K. Hahn, A. Wagener, J. Popp, R. Brück

Proceedings Volume 6186, 61860S (2006) https://doi.org/10.1117/12.661919

KEYWORDS: Microelectromechanical systems, Materials processing, Fabrication, Process modeling, Manufacturing, Silicon, Device simulation, Environmental management, Process engineering, Photomasks

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Proceedings Article | 23 January 2006 Paper

Process design and tracking support for MEMS

A. Wagener, T. Schmidt, J. Popp, K. Hahn, R. Brück, D. Ortloff

Proceedings Volume 6109, 610908 (2006) https://doi.org/10.1117/12.644486

KEYWORDS: Microelectromechanical systems, Data storage, Data processing, Databases, Semiconducting wafers, Structural design, Process modeling, Environmental management, Prototyping, Interfaces

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Proceedings Article | 5 January 2006 Paper

Knowledge-based process simulation and design system for MEMS

J. Popp, T. Schmidt, A. Wagener, K. Hahn, R. Brück, A. Hössinger

Proceedings Volume 6035, 603512 (2006) https://doi.org/10.1117/12.638483

KEYWORDS: Microelectromechanical systems, Photomasks, Data processing, 3D modeling, Process modeling, Structural design, Environmental management, Device simulation, TCAD, Computer simulations

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Proceedings Article | 1 July 2005 Paper

CAD tool environment for MEMS process design support

T. Schmidt, A. Wagener, J. Popp, K. Hahn, R. Bruck

Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.608517

KEYWORDS: Computer aided design, Microelectromechanical systems, Etching, Data processing, Materials processing, Databases, Interfaces, Process engineering, Data modeling, Polymers

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Proceedings Article | 28 February 2005 Paper

Technology interfaces to microsystem and nanoelectronic processes

Thilo Schmidt, Andreas Wagener, Jens Popp, Kai Hahn

Proceedings Volume 5649, (2005) https://doi.org/10.1117/12.581830

KEYWORDS: Computer aided design, Data processing, Etching, Microelectromechanical systems, Databases, Interfaces, Nanoelectronics, Java, Computer architecture, Microsystems

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Proceedings Article | 22 January 2005 Paper

MEMS fabrication process management environment

Jens Popp, Thilo Schmidt, Andreas Wagener, Kai Hahn

Proceedings Volume 5715, (2005) https://doi.org/10.1117/12.590276

KEYWORDS: Data processing, Microelectromechanical systems, Data modeling, Etching, Environmental management, Databases, Interfaces, Computer aided design, Java, Device simulation

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Showing 5 of 13 publications

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