Thomas Overstolz
at Univ de Neuchâtel
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 21 April 2006 Paper
Proceedings Volume 6186, 61860H (2006) https://doi.org/10.1117/12.666511
KEYWORDS: Actuators, Oxides, Mirrors, Optical lithography, Interferometers, Electrodes, Adaptive optics, Deep reactive ion etching, Beam shaping, Microtechnology

Proceedings Article | 16 August 2004 Paper
Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.545581
KEYWORDS: Microelectromechanical systems, Actuators, Optical filters, Capacitors, Waveguides, Polarization, Etching, Electrodes, Silicon, Deep reactive ion etching

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