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Tina Seifert
at optiX fab GmbH
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Author
Publications (1)
Proceedings Article | 30 April 2023 Presentation
25 years of EUV multilayer optics development at optiX fab and Fraunhofer IOF
Torsten Feigl, Marco Perske, Hagen Pauer, Tobias Fiedler, Philipp Naujok, Klara Stallhofer, Tina Seifert, Annika Schmitt
Proceedings Volume PC12494, PC124940A (2023) https://doi.org/10.1117/12.2664589
KEYWORDS: Extreme ultraviolet, Multilayers, EUV optics, Semiconductors, Semiconducting wafers, Printing, Photons, Industry, Extreme ultraviolet lithography, Coating
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