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Tingjing Yan
at Institute of Semiconductors CAS
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Publications (1)
Proceedings Article | 5 August 2009 Paper
The fabrication of a 128×128 solar-blind AlGaN p-i-n back-illuminated ultraviolet photodetector array
Tingjing Yan, Ming Chong, Degang Zhao, Shuang Zhang, Lianghui Chen
Proceedings Volume 7383, 73831Q (2009) https://doi.org/10.1117/12.835502
KEYWORDS: Ultraviolet radiation, Photodetectors, Back illuminated sensors, Staring arrays, Sensors, Gallium nitride, Metalorganic chemical vapor deposition, Heterojunctions, Sapphire, Aluminum
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