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Wei Chen
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Publications (1)
Proceedings Article | 6 March 2015 Paper
Surface profile measurement of microstructures with steep slopes by sample-titling strategy
Bin Xu, Wei Chen, Yubo Huang, Kang Song, Shiping Zhao
Proceedings Volume 9446, 944623 (2015) https://doi.org/10.1117/12.2180891
KEYWORDS: Profiling, Scanners, Error analysis, Sensors, Clouds, Motion measurement, Scanning tunneling microscopy, Atomic force microscopy, Spherical lenses, Manufacturing
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