Ms. Wei Li Profile

Wei Li

PhD Student at Bosch PT

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Proceedings Article | 17 February 2011 Paper

On-chip integrated lensless fluorescence microscopy/spectroscopy module for cell-based sensors

Wei Li, Thorsten Knoll, Adam Sossalla, Heiko Bueth, Hagen Thielecke

Proceedings Volume 7894, 78940Q (2011) https://doi.org/10.1117/12.875417

KEYWORDS: Image sensors, Luminescence, Microfluidics, Sensors, CMOS sensors, Interference filters, Image processing, Coating, Microscopy, Silicon

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The integration of a fluorescence microscopy/spectroscopy module in cell-based lab-on-a-chip systems is of high interest for applications in cell-based diagnostics and substance evaluation in situ. We present an on-chip integrated lensless fluorescence imaging module applying the principle of contact/proximate optical lithography. The pixel resolution is comparable with a 4 x objective microscope. The module can be used for morphology and fluorescence imaging of mammalian cells (15 - 20 μm) as well as for testing the concentration of a fluorescent substance. The biological samples or solutions are sustained in disposable sterilized microfluidic chips with 1 μm thick silicon nitride (Si₃N₄) membranes. These chips are assembled on the surface of a 5 megapixel colored CMOS image sensor array with 1.75 μm pixel size, which is coated with an additional interference filter. Each culturing chip consists of a MEMS cavity chip and a PDMS microfluidic interface. The surface of the CMOS image sensor is smoothened using SU-8 photoresist spin-coating for a commercial grade interference filter (optical density ≥ 5) coating by Plasma-Ion Assisted Deposition thereafter. The function is demonstrated by primary imaging results of the non-/fluorescent mammalian cells/microspheres as well as by differentiating different concentrations of FITC solutions.

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