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Weiqi Li
at Huazhong Univ of Science and Technology
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Publications (4)
Proceedings Article | 21 June 2015 Paper
Correction of depolarization effect in Mueller matrix ellipsometry with polar decomposition method
Proceedings Volume 9526, 952619 (2015) https://doi.org/10.1117/12.2184786
KEYWORDS: Matrices, Silicon, Wave plates, Nanostructures, Mueller matrices, Metrology, Ellipsometry, Scanning electron microscopy, Sensors, Prototyping
Proceedings Article | 21 June 2015 Paper
Measurement errors induced by axis tilt of biplates in dual-rotating compensator Mueller matrix ellipsometers
Proceedings Volume 9526, 952617 (2015) https://doi.org/10.1117/12.2184772
KEYWORDS: Polarization, Magnesium fluoride, Calibration, Crystals, Optical components, Error analysis, Wave plates, Geometrical optics, Wave propagation, Prototyping
Proceedings Article | 10 October 2013 Paper
Correction on the effect of numerical aperture in optical scatterometry
Proceedings Volume 8916, 89162I (2013) https://doi.org/10.1117/12.2035546
KEYWORDS: Metrology, Scatterometry, Photoresist materials, Mueller matrices, Optics manufacturing, Data modeling, Scanning electron microscopy, Statistical modeling, Polarimetry, Silicon
Proceedings Article | 31 January 2013 Paper
Reduction of measurement errors with two-channel configuration in the Mueller matrix ellipsometer
Weiqi Li, Shiyuan Liu, Chuanwei Zhang, Xiuguo Chen
Proceedings Volume 8759, 875954 (2013) https://doi.org/10.1117/12.2014581
KEYWORDS: Error analysis, Prisms, Condition numbers, Polarizers, Optical components, Polarization, Birefringence, Numerical simulations, Interference (communication), Mirrors
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