Ms. Xiao Di Liu Profile

Xiao Di Liu

at KLA Corp

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 26 September 2019 Paper

Lithography printability review: an application on advanced photomask production for enhancing mask yield and cycle time

Wenjun Ling, Xuefei Qin, Dejian Li, Fen Xue, Jie Wang, Cong Lu, Mingjing Tian, Ming Chen, Vikram Tolani, Gregg Inderhees, Alexander Tan, Suo Li, Xiaodi Liu

Proceedings Volume 11148, 1114812 (2019) https://doi.org/10.1117/12.2536494

KEYWORDS: Photomasks, Inspection, Semiconducting wafers, Lithography, Mask making, Optical proximity correction, Manufacturing, Defect inspection, Scanners, Computer simulations

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years