In this paper, we propose a novel portable confocal-controlled LIBS microscopy method with highly integrated structure. A 2D MEMS mirror scanning mirror was utilized to achieve beam transverse scanning and compact imaging structure design. Confocal-controlled LIBS was utilized to increase the focusing abilities and reduced the size of the laser ablation, thereby achieving a better spatial resolution imaging. Thereafter, 3D elemental mapping was constructed from the morphological and LIBS spectral data of the sample. The system had a lateral resolution of geometrical and elemental maps of up 800 nm and 15 μm, which is basically consistent with the theoretical analysis.
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