Mr. Ying-Ku Joe Lin Profile

Ying-Ku Joe Lin

at United Microelectronics Corp

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Publications (2)

Proceedings Article | 15 March 2006 Paper

One method to monitor the PPD function of Nikon scanners and some reticle surface particle detection machines

Wei-Han Yang, Ying-Ku Lin, C. C. Huang

Proceedings Volume 6154, 61542H (2006) https://doi.org/10.1117/12.653008

KEYWORDS: Reticles, Particles, Pellicles, Scanners, Glasses, Calibration, Semiconducting wafers, Lithography, Sensors, Photomasks

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Proceedings Article | 17 May 2005 Paper

Reduction of edge defocus by modification of chuck shape on Nikon scanner S204B

Ying-Ku Lin, Chung-Chi Lin, Michael Tseng, Chih Chung Huang

Proceedings Volume 5755, (2005) https://doi.org/10.1117/12.598097

KEYWORDS: Semiconducting wafers, Atrial fibrillation, Scanners, Sensors, Clocks, Optimization (mathematics), Lithography, Calibration, Particles, Image sensors

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