Dr. Yiren Zhang Profile

Dr. Yiren Zhang

at Pall Corporation

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Publications (2)

Proceedings Article | 1 May 2023 Poster + Paper

Defectivity reduction in EUV resists through novel high-performance Point-Of-Use (POU) filters

Yiren Zhang, Toru Umeda, Hirokazu Sakakibara, Sheik Ansar Usman Ibrahim, Atsushi Sakamoto, Amarnauth Singh, Robert Shick, Karl Skjonnemand, Philippe Foubert, Waut Drent

Proceedings Volume 12498, 124981Y (2023) https://doi.org/10.1117/12.2660389

KEYWORDS: Tunable filters, Extreme ultraviolet lithography, Particles, Photoresist materials, Contamination

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Proceedings Article | 22 February 2021 Poster + Presentation

Novel functionalized membrane approaches to metal contamination control in advanced lithography filtration

Hassan Ait-Haddou, James Belmont, Frank Onyemauwa, Takehito Mizuno, Atsushi Hattori, Toru Umeda, Yiren Zhang, Timothy McKeon, Rajan Beera

Proceedings Volume 11612, 116120Z (2021) https://doi.org/10.1117/12.2584752

KEYWORDS: Metals, Lithography, Contamination control, Chemistry, Yield improvement, Semiconductors, Semiconducting wafers, Photoresist materials, Oxides, Nanoparticles

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