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Yohei Sogabe
at Nippon Control System Corp
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Publications (1)
Proceedings Article | 20 November 2024 Poster + Paper
Enhancing mask process correction on curvilinear data with Bézier curve representation
Ai Kaneko, Yohei Sogabe, So Yanaihara, Toshikazu Nagatani, Taigo Fujii, Tomokazu Hayashi, Masakazu Hamaji
Proceedings Volume 13216, 1321622 (2024) https://doi.org/10.1117/12.3034585
KEYWORDS: Data corrections, Data processing, Bias correction, Tolerancing, Deformation, Data conversion, Metals, Error analysis, SRAF, Mask making
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