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Yulin Zhang
at Lasertec USA Inc Deutschland
SPIE Involvement:
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Publications (1)
Proceedings Article | 10 April 2013 Paper
Productivity improvement through automated operation of reticle defect inspection tools in a wafer fab environment
Christian Holfeld, Heiko Wagner, Anna Tchikoulaeva, Steffen Loebeth, Stephan Melzig, Yulin Zhang, Shinichi Tanabe, Takenori Katoh, Koichi Moriizumi
Proceedings Volume 8681, 868126 (2013) https://doi.org/10.1117/12.2014480
KEYWORDS: Inspection, Reticles, Semiconducting wafers, Defect inspection, Photomasks, Manufacturing, Factory automation, Defect detection, Wafer manufacturing, Parallel processing
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