Mr. Zexin Pan Profile

Zexin Pan

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Publications (1)

Proceedings Article | 28 April 2023 Poster + Paper

Importance sampling in Gaussian random field EUV stochastic model for quantification of stochastic variability of EUV vias

Zexin Pan, Azat Latypov, Chih-I Wei, Peter De Bisschop, Germain Fenger, John Sturtevant

Proceedings Volume 12494, 1249419 (2023) https://doi.org/10.1117/12.2658651

KEYWORDS: Failure analysis, Stochastic processes, Monte Carlo methods, Extreme ultraviolet lithography, Extreme ultraviolet, Statistical analysis, Optical proximity correction, Error analysis

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