Dr. Zhiyun Chen Profile

Dr. Zhiyun Chen

Vice President Engineering at Pixelligent Technologies LLC

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 11 March 2010 Paper

Modeling of exploration of reversible contrast enhancement layers for double exposure lithography

Feng Shao, Gregory Cooper, Zhiyun Chen, Andreas Erdmann

Proceedings Volume 7640, 76400J (2010) https://doi.org/10.1117/12.846525

KEYWORDS: Photoresist materials, Lithography, Refractive index, Diffraction, Modulation, Nanoimprint lithography, Absorption, Nanocrystals, Nonlinear optics, Computer simulations

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years