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Biao Yang
at Guangdong Univ of Technology
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Author
Publications (1)
Proceedings Article | 24 January 2019 Paper
Fabrication of a high-fill-factor microlens array using different thermal reflow process
Proceedings Volume 11052, 110521J (2019) https://doi.org/10.1117/12.2522470
KEYWORDS: Microlens array, Lithography, Microlens, Photomasks, Photoresist materials, Digital micromirror devices, Thermal effects, Image processing, Laser applications
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