Articles

White light interferometric surface profiler

[+] Author Affiliations
Brian Bowe, Vincent Toal

Dublin Institute of Technology, Kevin Street, Dublin?8, Ireland

Opt. Eng. 37(6), 1796-1799 (Jun 01, 1998). doi:10.1117/1.601727
History: Received Oct. 4, 1997; Revised Jan. 21, 1998; Accepted Jan. 21, 1998
Text Size: A A A

Abstract

We describe an optical system for 3-D profilometry based on the white light interferometer. Recently many different methods have been used to analyze the data obtained from white light interferometric profilers. Many commercially available white light profilers are also in use today. We detail a simple way to construct a profiler that uses two simple and efficient algorithms. It deals with the data in a fast and simple manner, thus reducing both the acquisition and analysis time. The system has a theoretically unlimited range and can profile both optically rough and smooth surfaces. © 1998 Society of Photo-Optical Instrumentation Engineers.

© 1998 Society of Photo-Optical Instrumentation Engineers

Citation

Brian Bowe and Vincent Toal
"White light interferometric surface profiler", Opt. Eng. 37(6), 1796-1799 (Jun 01, 1998). ; http://dx.doi.org/10.1117/1.601727


Figures

Tables

References

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

PubMed Articles
Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.