1 July 2001 Low numerical aperture refractive microlenses in fused silica
Philippe Nussbaum, Hans Peter Herzig
Author Affiliations +
The realization of high quality refractive microlenses is well known and has been reported several times in the past.1 Various fabrication techniques have been used to obtain accurate surface-relief refractive microlenses. Well known are direct writing techniques and graytone lithography.
©(2001) Society of Photo-Optical Instrumentation Engineers (SPIE)
Philippe Nussbaum and Hans Peter Herzig "Low numerical aperture refractive microlenses in fused silica," Optical Engineering 40(7), (1 July 2001). https://doi.org/10.1117/1.1385335
Published: 1 July 2001
Lens.org Logo
CITATIONS
Cited by 16 scholarly publications.
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Microlens

Photoresist materials

Silica

Etching

Reactive ion etching

Spherical lenses

Mach-Zehnder interferometers

RELATED CONTENT

Fabrication of refractive microlens arrays
Proceedings of SPIE (May 12 1995)
Micro-optics for sensor applications
Proceedings of SPIE (August 26 1996)
Fabrication and measurement of fused silica microlens arrays
Proceedings of SPIE (January 13 1993)

Back to Top