Instrumentation, Techniques, and Measurement

Study on the roughness evolution of optical surfaces during ion beam sputtering

[+] Author Affiliations
Xiao Liang, Xiang Wang, Jin-Jin Zheng

University of Science and Technology of China, Department of Precision Machinery and Precision Instrumentation, 443 Huangshan Road, Hefei, Anhui 230026, China

Yong-Qiang Gu, Huai-Jiang Yang, Yong-Xin Sui

Chinese Academy of Sciences, Changchun Institute of Optics, Fine Mechanics and Physics, 3888 Dongnanhu Road, Changchun, Jilin 130033, China

Opt. Eng. 54(10), 104105 (Oct 12, 2015). doi:10.1117/1.OE.54.10.104105
History: Received July 21, 2015; Accepted September 11, 2015
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Abstract.  Ion beam machining technology has been extensively adopted to obtain an ultraprecision surface in ultraviolet lithography optics. However, there exist complex mechanisms leading the surface to evolve complicated topographies and increasing roughness. We build a kinetic model integrating with the typical sputter theory and a bond-counting Monte Carlo algorithm based on the compound materials to investigate the surface roughness evolution during ion beam sputtering. The influences of primary sputter, reflection, secondary sputter, geometrical shadowing, redeposition, and thermal diffusion were all taken into consideration to compose a dynamic evolution process. In calculation, using this model the surface first possesses a period of smoothing and then goes into a roughening stage, where the roughness follows the regular power law. Quantitative analyses of surface roughness derived from calculations are also examined and compared with experiments.

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© 2015 Society of Photo-Optical Instrumentation Engineers

Citation

Xiao Liang ; Xiang Wang ; Yong-Qiang Gu ; Jin-Jin Zheng ; Huai-Jiang Yang, et al.
"Study on the roughness evolution of optical surfaces during ion beam sputtering", Opt. Eng. 54(10), 104105 (Oct 12, 2015). ; http://dx.doi.org/10.1117/1.OE.54.10.104105


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