Influence of PDI and composition ratio for micro phase separation about PS-b-PMMA block copolymer

Terumasa Kosaka; Ryota Matsuki; Yukio Kawaguchi; Ryosuke Ogaki

doi:10.1117/12.2514961

25 March 2019 Influence of PDI and composition ratio for micro phase separation about PS-b-PMMA block copolymer

Terumasa Kosaka, Ryota Matsuki, Yukio Kawaguchi, Ryosuke Ogaki

Proceedings Volume 10960, Advances in Patterning Materials and Processes XXXVI; 109601I (2019) https://doi.org/10.1117/12.2514961
Event: SPIE Advanced Lithography, 2019, San Jose, California, United States

Abstract

We have successfully synthesized polystyrene(PS)-b-polymethylmethacrylate (PMMA) block copolymer that is precious with controlled molecular weight, PDI and composition ratio by living anionic polymerization method using large-scale apparatus. In addition, the influence of PDI, composition ratio and composition distribution for micro phase separation about PS-b-PMMA block copolymer is investigated. The results show that PDI is the major factor for defect, while composition ratio and composition distribution has influence for morphology. As PDI increase 1.06 to 1.13, also defects are increased a lot. As composition ratio of PS increase 51% to 60%, micro phase separation structure was changed from lamella to gyroid. Moreover, we surmised that these properties have a boundary of influence towards micro phase separation. Therefore, is necessary to control these properties by living anionic polymerization in order to use DSA materials in semiconductor process.

Citation Download Citation

Terumasa Kosaka, Ryota Matsuki, Yukio Kawaguchi, and Ryosuke Ogaki "Influence of PDI and composition ratio for micro phase separation about PS-b-PMMA block copolymer", Proc. SPIE 10960, Advances in Patterning Materials and Processes XXXVI, 109601I (25 March 2019); https://doi.org/10.1117/12.2514961

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