Integration of an amorphous silicon passive pixel sensor array with a lateral amorphous selenium detector for large area indirect conversion x-ray imaging applications

Kai Wang; Mohammad Y. Yazdandoost; Rasoul Keshavarzi; Kyung-Wook Shin; Christos Hristovski; Shiva Abbaszadeh; Feng Chen; Shaikh Hasibul Majid; Karim S. Karim

doi:10.1117/12.877592

16 March 2011 Integration of an amorphous silicon passive pixel sensor array with a lateral amorphous selenium detector for large area indirect conversion x-ray imaging applications

Kai Wang, Mohammad Y. Yazdandoost, Rasoul Keshavarzi, Kyung-Wook Shin, Christos Hristovski, Shiva Abbaszadeh, Feng Chen, Shaikh Hasibul Majid, Karim S. Karim

Author Affiliations +

Proceedings Volume 7961, Medical Imaging 2011: Physics of Medical Imaging; 79610V (2011) https://doi.org/10.1117/12.877592
Event: SPIE Medical Imaging, 2011, Lake Buena Vista (Orlando), Florida, United States

Abstract

Previously, we reported on a single-pixel detector based on a lateral a-Se metal-semiconductor-metal structure, intended for indirect conversion X-ray imaging. This work is the continuous effort leading to the first prototype of an indirect conversion X-ray imaging sensor array utilizing lateral amorphous selenium. To replace a structurally-sophisticated vertical multilayer amorphous silicon photodiode, a lateral a-Se MSM photodetector is employed which can be easily integrated with an amorphous silicon thin film transistor passive pixel sensor array. In this work, both 2×2 macro-pixel and 32×32 micro-pixel arrays were fabricated and tested along with discussion of the results.

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Kai Wang, Mohammad Y. Yazdandoost, Rasoul Keshavarzi, Kyung-Wook Shin, Christos Hristovski, Shiva Abbaszadeh, Feng Chen, Shaikh Hasibul Majid, and Karim S. Karim "Integration of an amorphous silicon passive pixel sensor array with a lateral amorphous selenium detector for large area indirect conversion x-ray imaging applications", Proc. SPIE 7961, Medical Imaging 2011: Physics of Medical Imaging, 79610V (16 March 2011); https://doi.org/10.1117/12.877592

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