Dr. Charles Tarrio
retired at (none)
SPIE Involvement:
Author
Publications (40)

Proceedings Article | 21 November 2023 Presentation + Paper
C. Tarrio, S. Grantham, R. Vest, T. Germer, B. Barnes, S. Moffitt, B. Simonds, M. Spidell
Proceedings Volume 12750, 127500F (2023) https://doi.org/10.1117/12.2686832
KEYWORDS: Extreme ultraviolet, Tunable filters, Metrology, Extreme ultraviolet lithography, Radiometry, Scatterometry, Vacuum chambers, Reflectivity, Polarization, Equipment

Proceedings Article | 9 September 2019 Paper
Proceedings Volume 11118, 111181P (2019) https://doi.org/10.1117/12.2529755
KEYWORDS: Aluminum, Optical filters, Transmittance, Oxidation, Signal attenuation, X-rays, Ultraviolet radiation, Infrared radiation

Proceedings Article | 16 March 2015 Paper
Proceedings Volume 9422, 94220K (2015) https://doi.org/10.1117/12.2085934
KEYWORDS: Multilayers, Reflectivity, Extreme ultraviolet lithography, Extreme ultraviolet, Annealing, Resistance, Oxides, Reflectometry, Silicon, Oxidation

Proceedings Article | 13 March 2015 Paper
Soichi Inoue, Eishi Shiobara, Takeshi Sasami, Isamu Takagi, Yukiko Kikuchi, Toru Fujimori, Shinya Minegishi, Robert Berg, Thomas Lucatorto, Shannon Hill, Charles Tarrio, Ivan Pollentier, Yen-Chih Lin, Yu-Jen Fan, Dominic Ashworth
Proceedings Volume 9422, 942212 (2015) https://doi.org/10.1117/12.2085700
KEYWORDS: Semiconducting wafers, Contamination, Picosecond phenomena, Temperature metrology, Extreme ultraviolet, Molecules, Extreme ultraviolet lithography, Electron beams, Standards development, Lithography

Proceedings Article | 17 April 2014 Paper
Proceedings Volume 9048, 90481I (2014) https://doi.org/10.1117/12.2046290
KEYWORDS: Sensors, Extreme ultraviolet, Reflectometry, Polarization, Radiation effects, Reflectivity, Motion models, EUV optics, 3D modeling, Data modeling

Showing 5 of 40 publications
Conference Committee Involvement (1)
Optical Constants of Materials for UV to X-Ray Wavelengths
4 August 2004 | Denver, Colorado, United States
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