Mr. Hiromu Kijima Profile

Hiromu Kijima

at Canon Inc

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Author

Publications (2)

Proceedings Article | 26 August 2024 Paper

NIL solutions using computational lithography for semiconductor device manufacturing

Yukio Nakano, Kenji Yamamoto, Sentaro Aihara, Hiromu Kijima, Satoru Jimbo, Humberto Evans, Shingo Ishida, Masayoshi Fujimoto, Shota Takami, Yuichiro Oguchi, Junichi Seki, Toshiya Asano, Osamu Morimoto

Proceedings Volume 13177, 1317709 (2024) https://doi.org/10.1117/12.3032446

KEYWORDS: Nanoimprint lithography, Artificial intelligence, Lithography, Overlay metrology, Metrology, Optical lithography, Data modeling, Manufacturing, Computer simulations, Semiconducting wafers

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Proceedings Article | 10 April 2024 Presentation + Paper

NIL solutions using computational lithography for semiconductor device manufacturing

Sentaro Aihara, Kenji Yamamoto, Yukio Nakano, Hiromu Kijima, Satoru Jimbo, Humberto Evans, Shingo Ishida, Masayoshi Fujimoto, Shota Takami, Yuichiro Oguchi, Junichi Seki, Toshiya Asano, Osamu Morimoto

Proceedings Volume 12954, 129540Z (2024) https://doi.org/10.1117/12.3009839

KEYWORDS: Nanoimprint lithography, Artificial intelligence, Lithography, Metrology, Computer simulations

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