Dr. Jaehyun Son Profile

Dr. Jaehyun Son

at Samsung Electronics

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Author

Publications (6)

Proceedings Article | 13 November 2024 Presentation

Massive on-cell overlay metrology solution based on Mueller-matrix analysis for advanced process control

Changhyeong Yoon, Hyukjoon Cho, Ji Yong Shin, Kihun Kang, Juntaek Oh, Donggun Lee, Jaehyun Son, Seunga Lim, Eunsoo Hwang, Jinsoo Lee, ByeongKi Kang, Jaewon Lee, Jinwoo Ahn, Taeyong Jo, Jungho Ahn, Jihye Lee, Seulki Kim, Kyunghoon Park, JangKyu Lee, Heedong Kwak, Younghoon Sohn, Yusin Yang, Myungjun Lee

Proceedings Volume PC13215, PC132150B (2024) https://doi.org/10.1117/12.3032695

KEYWORDS: Overlay metrology, Advanced process control, Metrology, Semiconductors, Imaging systems, Ellipsometry, Time metrology, Semiconductor manufacturing, Semiconducting wafers, Scanning electron microscopy

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Proceedings Article | 27 April 2023 Paper

Wide-field massive CD metrology based on the imaging Mueller-matrix ellipsometry for semiconductor devices

Juntaek Oh, Jaehyeon Son, Eunsoo Hwang, Jinwoo Ahn, Jaewon Lee, Byungkwan Oh, Donggun Lee, Seunga Lim, Kihun Kang, Sangil Im, Jibin Jeong, Taehyun Yun, Jinsoo Lee, Changhyeong Yoon, Hyukjoon Cho, Gangbu Kim, Byeongki Kang, Hankyoul Moon, Jong-hyun Hwang, Youngkyu Park, Taejoong Kim, Suyoung Lee, Yusin Yang, Myungjun Lee

Proceedings Volume 12496, 124962X (2023) https://doi.org/10.1117/12.2658131

KEYWORDS: Critical dimension metrology, Semiconducting wafers, Metrology, Semiconductors, Mueller matrices, Ellipsometry, Inspection

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Proceedings Article | 27 April 2023 Presentation + Paper

Massive overlay metrology solution by realizing imaging Mueller matrix spectroscopic ellipsometry

Jaehyeon Son, Juntaek Oh, Eunsoo Hwang, Jinwoo Ahn, Jaewon Lee, Byungkwan Oh, Donggun Lee, Seunga Lim, Kihun Kang, Sangil Im, Jibin Jeong, Taehyun Yun, Jinsoo Lee, Changhyeong Yoon, Hyukjoon Cho, Gangbu Kim, Byeongki Kang, Hankyoul Moon, Jong-hyun Hwang, Youngkyu Park, Taejoong Kim, Suyoung Lee, Yusin Yang, Myungjun Lee

Proceedings Volume 12496, 124960L (2023) https://doi.org/10.1117/12.2657414

KEYWORDS: Overlay metrology, Mueller matrices, Semiconducting wafers, Spectroscopic ellipsometry, Critical dimension metrology, Imaging spectroscopy, Metrology, Polarization, Polysomnography, Image sensors

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Proceedings Article | 21 August 2020 Presentation + Paper

Vision-based high speed wafer film thickness profile estimation with nonlinear regression

Doo-Hyun Cho, Hyounggon Kim, Jaehyeon Son, Sung-Ha Kim, Taejoong Kim, Kwangsung Lee

Proceedings Volume 11500, 115000K (2020) https://doi.org/10.1117/12.2566426

KEYWORDS: Data modeling, Semiconducting wafers, Metrology, Image processing, General packet radio service, Visual process modeling, Sensors, Chemical mechanical planarization, RGB color model

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Proceedings Article | 11 March 2020 Presentation

Lens-free through-focus super resolution holographic microscopy with novel phase retrieval algorithm (Conference Presentation)

Kyungwon Yun, Jaehyeon Son, Taewan Kim, Seung Beom Park, Jaehwang Jung, Daejun Park, Doyoung Kim, Myungjun Lee

Proceedings Volume 11249, 112490M (2020) https://doi.org/10.1117/12.2551033

KEYWORDS: Super resolution, Holography, Phase retrieval, Imaging systems, Microscopy, Image resolution, Reconstruction algorithms, Biomedical optics, Inspection, Diffraction

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Proceedings Article | 9 March 2020 Presentation

Super-resolution reflection-mode holographic microscope for 3d imaging of semiconductor devices without optical lens (Conference Presentation)

Jaehyeon Son, Seung Beom Park, Kyungwon Yun, Taewan Kim, Jaehwang Jung, Myungjun Lee

Proceedings Volume 11245, 1124506 (2020) https://doi.org/10.1117/12.2551036

KEYWORDS: Holography, Microscopy, Super resolution, Image resolution, Microscopes, Semiconductors, Stereoscopy, Optical semiconductors, Imaging devices, Wafer-level optics

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Showing 5 of 6 publications

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