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James P. Nole
at TelAztec LLC
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 1 July 2002 Paper
Fully automated interference lithography
Bruce McLeod, Adam Kelsey, Mark Leclerc, Daniel Resler, Sergey Liberman, James Nole
Proceedings Volume 4688, (2002) https://doi.org/10.1117/12.472277
KEYWORDS: Lithography, Semiconducting wafers, Beam splitters, Spatial filters, Photoresist materials, Calibration, Mirrors, Fiber optics, Beam delivery, Optical lithography
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