Metalenses are flat lenses made from thin films with sub-wavelength nano-optical structures that can be created using the same processes that have been developed for integrated circuit manufacturing. We present a workflow that simulates the manufacturing process and enables process engineers and optical designers to study the impact of manufacturing on metalens performance without waiting for multiple manufacture-and-test cycles. To demonstrate this workflow, we design several metalenses and characterize the impact of process variation on absolute focusing efficiency, transmission, and output electric field.
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