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Karen Nummy
at GLOBALFOUNDRIES Inc.
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 21 March 2017 Paper
Silicon photonics and challenges for fabrication
N. Feilchenfeld, K. Nummy, T. Barwicz, D. Gill, E. Kiewra, R. Leidy, J. Orcutt, J. Rosenberg, A. Stricker, C. Whiting, J. Ayala, B. Cucci, D. Dang, T. Doan, M. Ghosal, M. Khater, K. McLean, B. Porth, Z. Sowinski, C. Willets, C. Xiong, C. Yu, S. Yum, K. Giewont, W. M. Green
Proceedings Volume 10149, 101490D (2017) https://doi.org/10.1117/12.2263472
KEYWORDS: Photonic devices, Waveguides, Sensors, Germanium, Silicon, Manufacturing, Structured optical fibers, Scanning electron microscopy, Fiber couplers, Silicon photonics
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