Kazuhiro Takahashi
Program Manager at Kiyohara Optics Inc.
SPIE Involvement:
Author
Publications (17)

Proceedings Article | 23 March 2020 Presentation + Paper
Proceedings Volume 11327, 113270Y (2020) https://doi.org/10.1117/12.2551980
KEYWORDS: Optical alignment, Semiconducting wafers, Photomasks, Nanoimprint lithography, Overlay metrology, Error analysis, Wafer testing, Diffraction, High volume manufacturing, Distortion

Proceedings Article | 23 March 2011 Paper
Proceedings Volume 7973, 79730D (2011) https://doi.org/10.1117/12.878663
KEYWORDS: Photomasks, Lithography, Optical proximity correction, SRAF, Lithographic illumination, Source mask optimization, Binary data, Double patterning technology, Computer programming, Nanoimprint lithography

Proceedings Article | 23 March 2011 Paper
Proceedings Volume 7973, 797314 (2011) https://doi.org/10.1117/12.879522
KEYWORDS: Logic, Scanners, Source mask optimization, Optical lithography, Lithography, Transistors, 193nm lithography, Lithographic illumination, Cadmium, Double patterning technology

Proceedings Article | 4 March 2010 Paper
Proceedings Volume 7640, 76401A (2010) https://doi.org/10.1117/12.846264
KEYWORDS: Optical proximity correction, Photomasks, Lithography, Source mask optimization, Manufacturing, Lithographic illumination, Scanners, Optical lithography, Composites, Logic devices

Proceedings Article | 16 March 2009 Paper
Koichiro Tsujita, Koji Mikami, Hiroyuki Ishii, Ryo Nakayama, Mikio Arakawa, Takehiro Ueno, Shogo Fujie, Kazuhiro Takahashi
Proceedings Volume 7274, 72740Y (2009) https://doi.org/10.1117/12.813489
KEYWORDS: Scanners, Scanning electron microscopy, Photomasks, Optical lithography, Cadmium, Convolution, Polarization, Detection and tracking algorithms, Tolerancing, Manufacturing

Showing 5 of 17 publications
Conference Committee Involvement (10)
Optical Microlithography XXXI
27 February 2018 | San Jose, California, United States
Optical Microlithography XXX
28 February 2017 | San Jose, California, United States
Optical Microlithography XXIX
23 February 2016 | San Jose, California, United States
Optical Microlithography XXVIII
24 February 2015 | San Jose, California, United States
Optical Microlithography XXVII
25 February 2014 | San Jose, California, United States
Showing 5 of 10 Conference Committees
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