CONFERENCE PROCEEDINGS
Advanced Search
Dr. Maarten E. van Reijzen
at Tno
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 2 July 2019 Presentation + Paper
Improved sub-surface AFM using photothermal actuation
Maarten v. Reijzen , Mehmet Tamer, Maarten v. Es, Martijn v. Riel , Aliasghar Keyvani, Hamed Sadeghian, Marco v. d. Lans
Proceedings Volume 10959, 109590L (2019) https://doi.org/10.1117/12.2515441
KEYWORDS: Frequency modulation, Gold, Atomic force microscopy, Coating, Actuators, Modulation, Absorption, Overlay metrology, Amplitude modulation, Silicon
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top