Mr. Marco van der Lans Profile

Marco van der Lans

at TNO

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Author

Publications (2)

Proceedings Article | 2 July 2019 Presentation + Paper

Improved sub-surface AFM using photothermal actuation

Maarten v. Reijzen , Mehmet Tamer, Maarten v. Es, Martijn v. Riel , Aliasghar Keyvani, Hamed Sadeghian, Marco v. d. Lans

Proceedings Volume 10959, 109590L (2019) https://doi.org/10.1117/12.2515441

KEYWORDS: Frequency modulation, Gold, Atomic force microscopy, Coating, Actuators, Modulation, Absorption, Overlay metrology, Amplitude modulation, Silicon

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Proceedings Article | 13 March 2018 Presentation + Paper

Image-based overlay measurement using subsurface ultrasonic resonance force microscopy

M. S. Tamer, M. J. van der Lans, H. Sadeghian

Proceedings Volume 10585, 105850O (2018) https://doi.org/10.1117/12.2302959

KEYWORDS: Overlay metrology, Ultrasonics, Microscopy, Scanning probe microscopy, Semiconductors, Nondestructive evaluation, Optical alignment, Metrology, 3D metrology, Image resolution

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