Dr. Masanori Hirose Profile

Dr. Masanori Hirose

at KIOXIA Corp

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Publications (1)

Proceedings Article | 10 April 2024 Presentation

Preliminary qualification of 3D nanoimprint process for dual damascene wiring.

Masaki Mitsuyasu, Norikazu Takeuchi, Masanori Hirose, Shunsuke Honda, Akihiko Ando, Toshiaki Komukai, Motofumi Komori, Takuya Kono

Proceedings Volume PC12956, PC129560G (2024) https://doi.org/10.1117/12.3010093

KEYWORDS: Nanoimprint lithography, Overlay metrology, Optical lithography, Line edge roughness, High volume manufacturing, Etching, Yield improvement, Sustainable technology, Semiconductors, Semiconducting wafers

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