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Norikazu Takeuchi
at KIOXIA Corp
SPIE Involvement:
Author
Publications (2)
Proceedings Article | 10 April 2024 Presentation
Preliminary qualification of 3D nanoimprint process for dual damascene wiring.
Masaki Mitsuyasu, Norikazu Takeuchi, Masanori Hirose, Shunsuke Honda, Akihiko Ando, Toshiaki Komukai, Motofumi Komori, Takuya Kono
Proceedings Volume PC12956, PC129560G (2024) https://doi.org/10.1117/12.3010093
KEYWORDS: Nanoimprint lithography, Overlay metrology, Optical lithography, Line edge roughness, High volume manufacturing, Etching, Yield improvement, Sustainable technology, Semiconductors, Semiconducting wafers
Proceedings Article | 1 May 2023 Presentation + Paper
Fabrication of dual damascene structure with nanoimprint lithography and dry-etching
Norikazu Takeuchi, Genna Hasegawa, Toshiaki Komukai, Takahiro Iwasaki, Masayuki Hatano, Motofumi Komori, Takuya Kono
Proceedings Volume 12497, 124970E (2023) https://doi.org/10.1117/12.2657912
KEYWORDS: Silica, Photoresist processing, Electron beam lithography, Resistance, Semiconducting wafers, Fabrication, Optical lithography, Lithography
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