Mr. Michael S. McBurney Profile

Michael S. McBurney

Business Development Manager

SPIE Involvement:

Author

Publications (5)

Proceedings Article | 28 March 2017 Presentation + Paper

A hybrid solution using computational prediction and measured data to accurately determine process corrections with reduced overlay sampling

Ben Noyes, Babak Mokaberi, Ram Mandoy, Alex Pate, Ralph Huijgen, Mike McBurney, Owen Chen

Proceedings Volume 10145, 1014508 (2017) https://doi.org/10.1117/12.2257486

KEYWORDS: Metrology, Process control, Semiconductors, Semiconducting wafers, Overlay metrology, Control systems, Data modeling, Computing systems, Time metrology, Modeling

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Proceedings Article | 28 March 2017 Paper

Hybrid methodology for on-product focus control using CD and diffraction-based focus marks

Ben Noyes, Alex Pate, Steve Zhou, Marco J. van der Heijden, Kevin Park, Reza Sadat Gousheh, Ralph Huijgen, Michael McBurney, Francois van Loon

Proceedings Volume 10145, 1014526 (2017) https://doi.org/10.1117/12.2257419

KEYWORDS: Semiconducting wafers, Metrology, Semiconductors, Reticles, Finite element methods, Scanners, Critical dimension metrology, Inspection, Scanning electron microscopy, Cadmium

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Proceedings Article | 28 May 2004 Paper

NIF Pockels cell and frequency conversion crystals

Ruth Hawley-Fedder, Paul Geraghty, Susan Locke, Michael McBurney, Michael Runkel, Tayyab Suratwala, Samuel Thompson, Paul Wegner, Pamela Whitman

Proceedings Volume 5341, (2004) https://doi.org/10.1117/12.538482

KEYWORDS: Crystals, National Ignition Facility, Crystal optics, Computed tomography, Laser crystals, Frequency conversion, Wavefronts, Harmonic generation, Laser systems engineering, Photonic crystals

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Proceedings Article | 28 May 2004 Paper

Metrology of mirrors for the National Ignition Facility

Christopher Stolz, Michael Runkel, Michael McBurney, Robert Cheek, Joseph Menapace

Proceedings Volume 5341, (2004) https://doi.org/10.1117/12.538472

KEYWORDS: National Ignition Facility, Mirrors, Coating, Interferometers, Reflection, Photometry, Adaptive optics, Optics manufacturing, Laser scattering, Metrology

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Proceedings Article | 27 December 2001 Paper

Correlation of test data from some NIF small optical components

Robert Chow, Michael McBurney, William Eickelberg, Wade Williams, Michael Thomas

Proceedings Volume 4451, (2001) https://doi.org/10.1117/12.453637

KEYWORDS: Wavefronts, National Ignition Facility, Coating, Laser damage threshold, Laser induced damage, Optical filters, Laser systems engineering, Optical components, Interferometers, Laser optics

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