Mr. Tadahiko Saito Profile

Tadahiko Saito

at ASET

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Publications (2)

Proceedings Article | 30 July 2002 Paper

Development of low-loss optical coatings for 157-nm lithography

Ryuji Biro, Kazuho Sone, Shunsuke Niisaka, Minoru Otani, Yasuyuki Suzuki, Chidane Ouchi, Tadahiko Saito, Masanobu Hasegawa, Jun Saito, Akira Tanaka, Akira Matsumoto

Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474550

KEYWORDS: Optical coatings, Lithography, Neodymium, Spectroscopy, Fluorine, Vacuum ultraviolet, Lenses, Transmittance, Absorption, Reflection

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Proceedings Article | 10 December 2001 Paper

Measurement of total integrated scatter of optical coatings for 157-nm lithography

Tadahiko Saito, Jun Saito, Etsuro Nakamura, Tatsunobu Kudo, Masanao Kagaya, Tetsuo Takahashi

Proceedings Volume 4449, (2001) https://doi.org/10.1117/12.450106

KEYWORDS: Coating, Photodetectors, Antireflective coatings, Scatter measurement, Sensors, Vacuum ultraviolet, Silicon, Optical coatings, Nitrogen, Light scattering

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