Mr. Tetsuya Kawata Profile

Tetsuya Kawata

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Publications (1)

Proceedings Article | 22 February 2021 Poster + Presentation + Paper

Absolute coordinate system adjustment and calibration by using standalone alignment metrology system

Satoshi Ando, Haruki Saito, Sayuri Tanaka, Tetsuya Kawata, Takanobu Okamoto, Katsushi Makino, Yuji Shiba, Takehisa Yahiro, Jun Ishikawa, Masahiro Morita

Proceedings Volume 11611, 116112S (2021) https://doi.org/10.1117/12.2583695

KEYWORDS: Optical alignment, Metrology, Lithography, Calibration, Distortion, Semiconducting wafers, Overlay metrology, Scanners

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