Dr. Thomas W. Smith Profile

Dr. Thomas W. Smith

Professor at Rochester Institute of Technology

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Publications (2)

Proceedings Article | 30 March 2010 Paper

Alternatives to chemical amplification for 193nm lithography

Burak Baylav, Meng Zhao, Ran Yin, Peng Xie, Chris Scholz, Bruce Smith, Thomas Smith, Paul Zimmerman

Proceedings Volume 7639, 763915 (2010) https://doi.org/10.1117/12.846924

KEYWORDS: Polymers, Polymethylmethacrylate, Photoresist materials, Etching, Lithography, Resistance, Absorbance, Deep ultraviolet, Photoresist developing, Scanning electron microscopy

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Proceedings Article | 28 July 2003 Paper

Modulation of refractive index in polymer composites: toward a synthetic bio-optic lens

Thomas Smith, Gary Wnek

Proceedings Volume 5051, (2003) https://doi.org/10.1117/12.484715

KEYWORDS: Refractive index, Composites, Modulation, Polymers, Silicon, Crystals, Photorefractive polymers, Polarization, Potassium, Oxides

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