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Dr. Xiaofeng Peng
at Saint-Gobain Research (Shanghai) Co Ltd
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Author
Publications (1)
Proceedings Article | 29 November 2000 Paper
Preparation and characterization of silicon carbide thin films synthesized by rf reactive sputtering
Xiaofeng Peng, Yuzhi Zhang, Lixin Song, Xingfang Hu
Proceedings Volume 4086, (2000) https://doi.org/10.1117/12.408436
KEYWORDS: Silicon carbide, Thin films, Sputter deposition, Raman spectroscopy, FT-IR spectroscopy, Carbon, Chemical species, Silicon films, Silicon, Absorption
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