Mr. Xijun Guan Profile

Xijun Guan

at Shanghai Huali Integrated Circuit Corp.

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Publications (2)

Proceedings Article | 13 June 2022 Presentation

A holistic study of edge placement error on fin cut layer in self-aligned double patterning process

Yuyang Bian, Biqiu Liu, Xijun Guan, Xiaobo Guo, Cong Zhang, Wenzhan Zhou, Jun Huang, Yu Zhang, Jiawang Song, Yang Gao, Shmuel Nissim, Kevin Houchens, Omri Baum, Qiang Zhou, Zaisan Yang, Amit Zakay, Tal Ayzik, Yaniv Abramovitz

Proceedings Volume PC12053, PC120530D (2022) https://doi.org/10.1117/12.2614221

KEYWORDS: Overlay metrology, Double patterning technology, Edge roughness, Scanning electron microscopy, Manufacturing, Line width roughness, Line edge roughness, Integrated circuits, Electron microscopy, Critical dimension metrology

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Proceedings Article | 22 February 2021 Poster + Presentation + Paper

Effects of lithography process conditions on unbiased line roughness by PSD analysis

Yuyang Bian, Lulu Lai, Song Gao, Dandan Hu, Xijun Guan, Biqiu Liu, Xiaobo Guo, Cong Zhang, Jun Huang, Yu Zhang, Yongyu Yuan, Yujie Xu

Proceedings Volume 11611, 116112I (2021) https://doi.org/10.1117/12.2583545

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