Mr. Yi-Ren Huang Profile

Yi-Ren Huang

at Printech International Inc

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Publications (2)

Proceedings Article | 5 July 2000 Paper

Novel dual-layer polymeric antireflective coating (PARC) for sub-0.18-um KrF lithography

Kung Linliu, Yi-Ren Huang, Mai-Rue Kuo

Proceedings Volume 4000, (2000) https://doi.org/10.1117/12.388931

KEYWORDS: Bottom antireflective coatings, Polymers, Etching, Photoresist materials, Reflectivity, Oxides, Optical lithography, Polymer thin films, Antireflective coatings, Deep ultraviolet

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Proceedings Article | 5 July 2000 Paper

Novel polymeric antireflective coating (PARC) for better uniformity control of critical dimension

Kung Linliu, Mai-Rue Kuo, Yi-Ren Huang

Proceedings Volume 4000, (2000) https://doi.org/10.1117/12.389087

KEYWORDS: Bottom antireflective coatings, Polymers, Etching, Photoresist materials, Deep ultraviolet, Reflectivity, Polymer thin films, Semiconducting wafers, Critical dimension metrology, Antireflective coatings

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