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Yunhyeok Ko
PhD Candidate
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Author
Publications (2)
Proceedings Article | 20 August 2020 Presentation
Pattern quality analysis in a digital lithography system using scanning point array method
Proceedings Volume 11484, 114840J (2020) https://doi.org/10.1117/12.2567399
KEYWORDS: Lithography, Electron beam lithography, Photomasks, Digital micromirror devices, Optical lithography, Semiconducting wafers, Zone plates, Mirrors
Proceedings Article | 19 August 2020 Presentation
Characterization of position and two-dimensional profiles of high-density beam spot array for digital lithography system
Proceedings Volume 11509, 115090H (2020) https://doi.org/10.1117/12.2567574
KEYWORDS: Lithography, Digital micromirror devices, Inspection, Charge-coupled devices, Optical lithography, Photomasks, Beam shaping, Optical testing, Optical filtering, Lenses
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