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We developed back-illuminated Ge-on-Si photodiodes to apply such microstructures. Especially the usage of light trapping structures to increase the quantum efficiency of the photodiodes shows great potential. Among the different microstructures we chose black silicon (b-Si) as a promising light trapping candidate. After the fabrication, photodiodes with different configurations were evaluated. The obtained results show a strong increase of the quantum efficiency due to both, the existence of an Al mirror and the application of b-Si.
This paper presents several new diffuser concepts, both reflective as well as transmissive, with their respective key performance metrics for both NA=0.33 and NA=0.55 EUV projection optics. These concepts can be used for measuring wavefront quality from dedicated fiducial plates, or for measuring directly from the imaging reticle. The latter would enable a combination of reticle alignment with lens aberration control without throughput penalty.
It will be shown that with these diffuser concepts, we have a solution for in-situ aberration control for 5nm nodes and below.
The Radial Velocity Spectrometer (RVS) of Gaia measures the red shift of the stars in the spectral band between 847 nm and 874 nm. The spectrometer is a fully refractive optics consisting of 2 Fery prisms, 2 prisms, a pass band filter and a blazed transmission grating (instrument mass about 30 kg). It is located in the vicinity of the focal plane and illuminates 12 of the 106 Charge Coupled Devices (CCDs).
Gaia is in the implementation phase, the launch of the 2120 kg mass satellite is planned in Dec. 2012.
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