Prof. David L. Dickensheets Profile

Prof. David L. Dickensheets

Professor/Director at Montana State Univ

SPIE Involvement:

Conference Program Committee | Editorial Board Member: Journal of Optical Microsystems | Author

Publications (40)

Proceedings Article | 12 March 2024 Presentation + Paper

Dynamic focus control in a coherent lidar using a fast MEMS mirror

Andrew Oliver, Stevens Shea, Michael Roddewig, Joseph Shaw, David Dickensheets

Proceedings Volume 12899, 128990C (2024) https://doi.org/10.1117/12.3000543

KEYWORDS: Mirrors, LIDAR, Signal detection, Microelectromechanical systems, Point clouds, Target detection

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Proceedings Article | 8 March 2023 Presentation + Paper

Polarization-based, transmissive-reflective beam scanner operating around 1550 nm using off-the-shelf components

Jordan Baker, Kenneth Lang, David Dickensheets, Wataru Nakagawa

Proceedings Volume 12428, 124280C (2023) https://doi.org/10.1117/12.2651044

KEYWORDS: Scanners, Polarizers, Polarization, Reflection, Laser scanners, Polarized light, Optical scanning systems, Galvanometers, Microelectromechanical systems

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Proceedings Article | 2 March 2022 Presentation + Paper

High bandwidth back-scanning mirror for coherent chirped pulse lidar imaging

Andrew Oliver, Adam Eichhorn, Samantha Hampshire, David Dickensheets

Proceedings Volume 12013, 120130B (2022) https://doi.org/10.1117/12.2610861

KEYWORDS: Mirrors, LIDAR, Microelectromechanical systems, Silicon, Electrodes, Semiconducting wafers

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Proceedings Article | 4 March 2019 Presentation + Paper

MEMS-in-the-lens 3D beam scanner for in vivo microscopy

David Dickensheets, Tianbo Liu, Milind Rajadhyaksha

Proceedings Volume 10931, 1093110 (2019) https://doi.org/10.1117/12.2514579

KEYWORDS: Mirrors, Monochromatic aberrations, Scanners, 3D scanning, Microopto electromechanical systems, Tissues, Laser scanners, Diffraction, Electrodes, Glasses

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SPIE Journal Paper | 6 October 2017

Black silicon integrated aperture

Tianbo Liu, David Dickensheets

JM3, Vol. 16, Issue 04, 045501, (October 2017) https://doi.org/10.1117/12.10.1117/1.JMM.16.4.045501

KEYWORDS: Silicon, Etching, Reflectivity, Semiconducting wafers, Cryogenics, Microopto electromechanical systems, Mirrors, Deformable mirrors, Dry etching, Imaging systems

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Proceedings Article | 30 August 2017 Presentation + Paper

Polarization-selective infrared bandpass filter based on a two-layer subwavelength metallic grating

Andrew Hohne, Benjamin Moon, Carol Baumbauer, Tristan Gray, James Dilts, Joseph Shaw, David Dickensheets, Wataru Nakagawa

Proceedings Volume 10407, 104070H (2017) https://doi.org/10.1117/12.2273065

KEYWORDS: Optical design, Bandpass filters, Infrared imaging, Infrared radiation, Polarization, Clouds, Surface plasmon polaritons, Polarimetry

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SPIE Journal Paper | 12 October 2016 Open Access

Dynamic performance of microelectromechanical systems deformable mirrors for use in an active/adaptive two-photon microscope

Christian Archer-Zhang, Warren Foster, Ryan Downey, Christopher Arrasmith, David Dickensheets

JBO, Vol. 21, Issue 12, 121507, (October 2016) https://doi.org/10.1117/12.10.1117/1.JBO.21.12.121507

KEYWORDS: Mirrors, Monochromatic aberrations, Microelectromechanical systems, Microscopes, Wavefronts, Deformable mirrors, Aberration correction, Objectives, Active optics, Actuators

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Proceedings Article | 15 March 2016 Presentation + Paper

Dynamic performance of MEMS deformable mirrors for use in an active/adaptive two-photon microscope

Christian Zhang, Warren Foster, Ryan Downey, Christopher Arrasmith, David Dickensheets

Proceedings Volume 9717, 97170G (2016) https://doi.org/10.1117/12.2216331

KEYWORDS: Mirrors, Deformable mirrors, Active optics, Microelectromechanical systems, Microscopes, Adaptive optics, Aberration correction, Control systems, Monochromatic aberrations, Light scattering, Wavefronts, Spherical lenses, Tissue optics

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Proceedings Article | 29 February 2016 Presentation + Paper

Dermoscopy-guided reflectance confocal microscopy of skin using high-NA objective lens with integrated wide-field color camera

David Dickensheets, Seth Kreitinger, Gary Peterson, Michael Heger, Milind Rajadhyaksha

Proceedings Volume 9689, 96890U (2016) https://doi.org/10.1117/12.2213332

KEYWORDS: Skin, Cameras, Objectives, Reflectivity, Confocal microscopy, Skin cancer, Biopsy, Pathology, Adhesives, CMOS cameras, Sensors, Imaging systems, Modulation transfer functions, Tissue optics

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Proceedings Article | 12 March 2014 Paper

Agile scanning using a MEMS focus control mirror in a commercial confocal microscope

Sarah Lukes, David Dickensheets

Proceedings Volume 8949, 89490W (2014) https://doi.org/10.1117/12.2042249

KEYWORDS: Mirrors, Microelectromechanical systems, Electrodes, Microscopes, Point spread functions, Confocal microscopy, Objectives, Monochromatic aberrations, Semiconducting wafers, Silicon

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Proceedings Article | 7 March 2014 Paper

High speed focus control capability of electrostatic-pneumatic MEMS deformable mirrors

Mohammad Moghimi, Krishna Chattergoon, David Dickensheets

Proceedings Volume 8977, 897709 (2014) https://doi.org/10.1117/12.2042195

KEYWORDS: Mirrors, Actuators, Deformable mirrors, Sensors, Microelectromechanical systems, Semiconducting wafers, Silicon, Electrodes, Optical components, Epoxies

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Proceedings Article | 5 March 2013 Paper

Electrostatic-pneumatic membrane mirror with positive or negative variable optical power

Mohammad Moghimi, Chris Wilson, David Dickensheets

Proceedings Volume 8617, 861707 (2013) https://doi.org/10.1117/12.2008440

KEYWORDS: Mirrors, Actuators, Deformable mirrors, Semiconducting wafers, Silicon, Microelectromechanical systems, Aluminum, Digital signal processing, Epoxies, Protactinium

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SPIE Journal Paper | 12 October 2012 Open Access

Improved micro-optoelectromechanical systems deformable mirror for in vivo optical microscopy

Mohammad Moghimi, Chris Wilson, David Dickensheets

JM3, Vol. 11, Issue 4, 043006, (October 2012) https://doi.org/10.1117/12.10.1117/1.JMM.11.4.043006

KEYWORDS: Mirrors, Monochromatic aberrations, Electrodes, Semiconducting wafers, Deformable mirrors, Wafer bonding, Microopto electromechanical systems, Silicon, Aluminum, Control systems

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SPIE Journal Paper | 13 March 2012 Open Access

Errata: MOEMS deformable mirrors for focus control in vital microscopy

Mohammad Moghimi, B. Jeffrey Lutzenberger, David Dickensheets, Brant Kaylor

JM3, Vol. 11, Issue 1, 019801, (March 2012) https://doi.org/10.1117/12.10.1117/1.JMM.11.1.019801

KEYWORDS: Monochromatic aberrations, Microopto electromechanical systems, Deformable mirrors, Microscopy, Computer engineering, Photonics, Zernike polynomials, Spherical lenses

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Proceedings Article | 16 February 2012 Paper

Miniature non-mechanical zoom camera using deformable MOEMS mirrors

Brant Kaylor, Christopher Wilson, Nathan Greenfield, Peter Roos, Eric Seger, Mohammad Moghimi, David Dickensheets

Proceedings Volume 8252, 82520N (2012) https://doi.org/10.1117/12.909146

KEYWORDS: Zoom lenses, Microopto electromechanical systems, Cameras, Mirrors, Semiconducting wafers, Optical components, Deformable mirrors, Cell phones, Image sensors, Lens design

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Proceedings Article | 16 February 2012 Paper

MEMS focus control and spherical aberration correction for multilayer optical discs

Sarah Lukes, David Dickensheets

Proceedings Volume 8252, 82520L (2012) https://doi.org/10.1117/12.910632

KEYWORDS: Monochromatic aberrations, Mirrors, Electrodes, Microelectromechanical systems, Digital video discs, Glasses, Objectives, Deformable mirrors, Optical discs, Gold

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Proceedings Article | 16 February 2012 Paper

Deformable mirror with controlled air damping for fast focus tracking and scanning

Mohammad Moghimi, Krishna Chattergoon, Chris Wilson, David Dickensheets

Proceedings Volume 8252, 82520M (2012) https://doi.org/10.1117/12.910977

KEYWORDS: Mirrors, Semiconducting wafers, Deformable mirrors, Microelectromechanical systems, Etching, Electrodes, Silicon, Aluminum, Cryogenics, Wafer bonding

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Proceedings Article | 7 February 2012 Paper

Stress engineering for free-standing SU-8 2002 thin film devices

Kyle Oliver, Sarah Lukes, Mohammad Moghimi, David Dickensheets

Proceedings Volume 8248, 82480H (2012) https://doi.org/10.1117/12.910967

KEYWORDS: Semiconducting wafers, Ultraviolet radiation, Etching, Silicon, Thin films, Temperature metrology, Thin film devices, Silicon films, Manufacturing, Microelectromechanical systems

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SPIE Journal Paper | 1 April 2011 Open Access

MOEMS deformable mirrors for focus control in vital microscopy

Mohammad Moghimi, B. Jeffrey Lutzenberger, Brant Kaylor, David Dickensheets

JM3, Vol. 10, Issue 02, 023005, (April 2011) https://doi.org/10.1117/12.10.1117/1.3574129

KEYWORDS: Mirrors, Microopto electromechanical systems, Monochromatic aberrations, Deformable mirrors, Microscopy, Electrodes, Control systems, Semiconducting wafers, Imaging systems, Aluminum

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SPIE Journal Paper | 1 April 2011

Errata: MOEMS deformable mirrors for focus control in vital microscopy

Brant Kaylor, Mohammad Moghimi, David Dickensheets

JM3, Vol. 10, Issue 02, 029802, (April 2011) https://doi.org/10.1117/12.10.1117/1.3599423

Proceedings Article | 14 February 2011 Paper

SU-8 focus control mirrors released by XeF2 dry etch

Sarah Lukes, David Dickensheets

Proceedings Volume 7930, 793006 (2011) https://doi.org/10.1117/12.877077

KEYWORDS: Mirrors, Etching, Monochromatic aberrations, Silicon, Control systems, Microelectromechanical systems, Electrodes, Dry etching, Microscopy, Gold

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Proceedings Article | 14 February 2011 Paper

An improved focus control mirror using SU-8 wafer bonding process

Mohammad Moghimi, B. Jeffery Lutzenberger, Kyle Oliver, Steven Gates, Xiaohu Xue, Brant Kaylor, David Dickensheets

Proceedings Volume 7930, 793005 (2011) https://doi.org/10.1117/12.876672

KEYWORDS: Mirrors, Semiconducting wafers, Electrodes, Monochromatic aberrations, Wafer bonding, Deformable mirrors, Silicon, Etching, Aluminum, Control systems

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Proceedings Article | 17 February 2010 Paper

Surface micro-machined SU-8 2002 membrane mirrors for focus control

Sarah Lukes, David Lämmle, David Dickensheets

Proceedings Volume 7594, 75940E (2010) https://doi.org/10.1117/12.844292

KEYWORDS: Mirrors, Silicon, Electrodes, Gold, Semiconducting wafers, Oxides, Etching, Deformable mirrors, Microelectromechanical systems, Control systems

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Proceedings Article | 17 February 2010 Paper

MEMS deformable mirrors for focus control in vital microscopy

B. Jeffrey Lutzenburger, Mohammad Moghimi, Sarah Lukes, Brant Kaylor, David Dickensheets

Proceedings Volume 7594, 759406 (2010) https://doi.org/10.1117/12.843874

KEYWORDS: Mirrors, Microelectromechanical systems, Microscopy, Semiconducting wafers, Imaging systems, Electrodes, Monochromatic aberrations, Deformable mirrors, Control systems, Etching

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SPIE Journal Paper | 1 October 2009

Feedback-stabilized deformable membrane mirrors for focus control

Sarah Lukes, Phillip Himmer, Eric Moog, Steven Shaw, David Dickensheets

JM3, Vol. 8, Issue 04, 043040, (October 2009) https://doi.org/10.1117/12.10.1117/1.3249659

KEYWORDS: Capacitance, Feedback control, Mirrors, Control systems, Actuators, Microelectromechanical systems, Deformable mirrors, Oscillators, Capacitors, Electrodes

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Proceedings Article | 24 February 2009 Paper

Feedback stabilized deformable membrane mirrors for focus control

Sarah Lukes, Phillip Himmer, Eric Moog, Steven Shaw, David Dickensheets

Proceedings Volume 7208, 72080Q (2009) https://doi.org/10.1117/12.812338

KEYWORDS: Mirrors, Capacitance, Feedback control, Oscillators, Control systems, Actuators, Silicon, Microelectromechanical systems, Deformable mirrors, Capacitors

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Proceedings Article | 23 February 2009 Paper

A MEMS based handheld confocal microscope with Raman spectroscopy for in-vivo skin cancer diagnosis

Christopher Arrasmith, Chetan Patil, David Dickensheets, Anita Mahadevan-Jansen

Proceedings Volume 7169, 71690N (2009) https://doi.org/10.1117/12.812071

KEYWORDS: Confocal microscopy, Raman spectroscopy, Microscopes, In vivo imaging, Skin, Objectives, Mirrors, Microelectromechanical systems, Skin cancer, Reflectivity

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SPIE Journal Paper | 1 April 2008

Requirements of MEMS membrane mirrors for focus adjustment and aberration correction in endoscopic confocal and optical coherence tomography imaging instruments

David Dickensheets

JM3, Vol. 7, Issue 02, 021008, (April 2008) https://doi.org/10.1117/12.10.1117/1.2911024

KEYWORDS: Mirrors, Monochromatic aberrations, Optical coherence tomography, Confocal microscopy, Imaging systems, Tissues, Objectives, Optical components, Microelectromechanical systems, Microscopes

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Proceedings Article | 9 February 2007 Paper

MEMS membrane mirrors for focus adjustment and aberration correction in endoscopic confocal and OCT imaging instruments

David Dickensheets

Proceedings Volume 6467, 646707 (2007) https://doi.org/10.1117/12.706699

KEYWORDS: Monochromatic aberrations, Mirrors, Confocal microscopy, Optical coherence tomography, Tissues, Imaging systems, Objectives, Optical components, Silicon, Microelectromechanical systems

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SPIE Journal Paper | 1 October 2005

MOEMS 3-D scan mirror for single-point control of beam deflection and focus

Yuhe Shao, David Dickensheets

JM3, Vol. 4, Issue 04, 041502, (October 2005) https://doi.org/10.1117/12.10.1117/1.2107127

KEYWORDS: Mirrors, 3D scanning, Silicon, Etching, Microopto electromechanical systems, Microscopes, Confocal microscopy, Electrodes, 3D acquisition, Control systems

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Proceedings Article | 24 January 2004 Paper

MEMS 3D scan mirror

Yuhe Shao, David Dickensheets

Proceedings Volume 5348, (2004) https://doi.org/10.1117/12.523902

KEYWORDS: Mirrors, Etching, Silicon, 3D scanning, Electrodes, 3D acquisition, Microelectromechanical systems, Microscopes, Confocal microscopy, Oxides

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Proceedings Article | 24 January 2004 Paper

Dynamic behavior of high-speed silicon nitride deformable mirrors

Phillip Himmer, David Dickensheets

Proceedings Volume 5348, (2004) https://doi.org/10.1117/12.525509

KEYWORDS: Mirrors, Monochromatic aberrations, Deformable mirrors, Silicon, Electrodes, Semiconductor lasers, Phase shifts, Etching, Control systems, Wavefronts

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Proceedings Article | 20 January 2003 Paper

Off-axis variable focus and aberration control mirrors

Phillip Himmer, David Dickensheets

Proceedings Volume 4985, (2003) https://doi.org/10.1117/12.477815

KEYWORDS: Mirrors, Silicon, Monochromatic aberrations, Deformable mirrors, Wavefront aberrations, Electrodes, Off axis mirrors, Wavefronts, Reflectors, Imaging systems

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Proceedings Article | 2 October 2001 Paper

Silicon nitride biaxial pointing mirrors with stiffening ribs

Todd Kaiser, B. Jeffrey Lutzenberger, Robert Friholm, Phillip Himmer, David Dickensheets

Proceedings Volume 4561, (2001) https://doi.org/10.1117/12.443096

KEYWORDS: Mirrors, Silicon, Etching, Electrodes, Surface micromachining, Optical fibers, Oxides, Reflectivity, Mirror pointing, Metals

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Proceedings Article | 2 October 2001 Paper

Vertical stiffening members for flatness control of surface-micromachined structures

B. Jeffrey Lutzenberger, David Dickensheets

Proceedings Volume 4561, (2001) https://doi.org/10.1117/12.443091

KEYWORDS: Silicon, Metals, Finite element methods, Mirrors, Optical simulations, Silicon films, Etching, Oxides, Gold, Composites

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Proceedings Article | 22 August 2000 Paper

Miniature high-resolution imaging system with 3D MOEMS beam scanning for Mars exploration

David Dickensheets, Phillip Himmer, Robert Friholm, B. Jeffrey Lutzenberger

Proceedings Volume 4178, (2000) https://doi.org/10.1117/12.396518

KEYWORDS: Mirrors, Silicon, Etching, Microopto electromechanical systems, Confocal microscopy, Mars, Raman spectroscopy, Electrodes, Monochromatic aberrations, Microscopes

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Proceedings Article | 2 September 1999 Paper

Pixel-by-pixel aberration correction for scanned-beam micro-optical instruments

David Dickensheets, Paul Ashcraft, Phillip Himmer

Proceedings Volume 3878, (1999) https://doi.org/10.1117/12.361286

KEYWORDS: Monochromatic aberrations, Mirrors, Gold, Aberration correction, Telescopes, Scanners, Wavefronts, Control systems, Reflectivity, Microelectromechanical systems

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Proceedings Article | 15 April 1997 Paper

Microfabricated biaxial electrostatic torsional scanning mirror

David Dickensheets, Gordon Kino

Proceedings Volume 3009, (1997) https://doi.org/10.1117/12.271223

KEYWORDS: Mirrors, Silicon, Electrodes, Microfabrication, Confocal microscopy, Microscopes, Optical microscopes, Semiconducting wafers, Oxides, Raster graphics

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Proceedings Article | 10 April 1996 Paper

Micromachined confocal optical microscope

David Dickensheets, Gordon Kino

Proceedings Volume 2655, (1996) https://doi.org/10.1117/12.237462

KEYWORDS: Mirrors, Microscopes, Silicon, Confocal microscopy, Monochromatic aberrations, Objectives, Optical microscopes, Scanners, Imaging systems, Micromachining

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Proceedings Article | 4 April 1994 Paper

Scanned optical fiber confocal microscope

David Dickensheets, Gordon Kino

Proceedings Volume 2184, (1994) https://doi.org/10.1117/12.172104

KEYWORDS: Microscopes, Objectives, Confocal microscopy, Silica, Optical fibers, Electrodes, Microscopy, Optical microscopes, Single mode fibers, Zone plates

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Showing 5 of 40 publications

Proceedings Volume Editor (7)

SPIE Conference Volume | 6 February 2009

MOEMS and Miniaturized Systems VIII

SPIE Conference Volume | 7 February 2008

MOEMS and Miniaturized Systems VII

SPIE Conference Volume | 20 January 2007

MOEMS and Miniaturized Systems VI

SPIE Conference Volume | 21 January 2006

MOEMS Display, Imaging, and Miniaturized Microsystems IV

SPIE Conference Volume | 22 January 2005

MOEMS Display and Imaging Systems III

Showing 5 of 7 publications

Conference Committee Involvement (38)

MOEMS and Miniaturized Systems XXIV

27 January 2025 | San Francisco, California, United States

MOEMS and Miniaturized Systems XXIII

29 January 2024 | San Francisco, California, United States

MOEMS and Miniaturized Systems XXII

30 January 2023 | San Francisco, California, United States

MOEMS and Miniaturized Systems XXI

24 January 2022 | San Francisco, California, United States

MOEMS and Miniaturized Systems XX

6 March 2021 | Online Only, California, United States

MOEMS and Miniaturized Systems XIX

1 February 2020 | San Francisco, California, United States

MOEMS and Miniaturized Systems XVIII

2 February 2019 | San Francisco, California, United States

Endoscopic Microscopy XIV

2 February 2019 | San Francisco, California, United States

MOEMS and Miniaturized Systems XVII

30 January 2018 | San Francisco, California, United States

Endoscopic Microscopy XIII

27 January 2018 | San Francisco, California, United States

MOEMS and Miniaturized Systems XVI

30 January 2017 | San Francisco, California, United States

Endoscopic Microscopy XII

29 January 2017 | San Francisco, California, United States

MOEMS and Miniaturized Systems XV

15 February 2016 | San Francisco, California, United States

Endoscopic Microscopy XI

14 February 2016 | San Francisco, California, United States

MOEMS and Miniaturized Systems XIV

9 February 2015 | San Francisco, California, United States

Endoscopic Microscopy X

8 February 2015 | San Francisco, California, United States

MOEMS and Miniaturized Systems XIII

3 February 2014 | San Francisco, California, United States

Endoscopic Microscopy IX

2 February 2014 | San Francisco, California, United States

SPIE MOEMS-MEMS

1 February 2014 | San Francisco, United States

MOEMS and Miniaturized Systems XII

4 February 2013 | San Francisco, California, United States

Endoscopic Microscopy VIII

3 February 2013 | San Francisco, California, United States

SPIE MOEMS-MEMS

2 February 2013 | San Francisco, United States

MOEMS and Miniaturized Systems XI

24 January 2012 | San Francisco, California, United States

Endoscopic Microscopy VII

22 January 2012 | San Francisco, California, United States

SPIE MOEMS-MEMS

21 January 2012 | San Francisco, United States

MOEMS and Miniaturized Systems X

24 January 2011 | San Francisco, California, United States

Endoscopic Microscopy VI

23 January 2011 | San Francisco, California, United States

MOEMS and Miniaturized Systems IX

25 January 2010 | San Francisco, California, United States

Endoscopic Microscopy V

25 January 2010 | San Francisco, California, United States

MOEMS and Miniaturized Systems VIII

27 January 2009 | San Jose, California, United States

MOEMS and Miniaturized Systems VII

22 January 2008 | San Jose, California, United States

MOEMS and Miniaturized Systems VI

24 January 2007 | San Jose, California, United States

MOEMS Display, Imaging, and Miniaturized Microsystems IV

25 January 2006 | San Jose, California, United States

MOEMS Display and Imaging Systems III

24 January 2005 | San Jose, California, United States

MOEMS and Miniaturized Systems IV

27 January 2004 | San Jose, California, United States

MOEMS Display and Imaging Systems II

26 January 2004 | San Jose, California, United States

MOEMS Display and Imaging Systems

28 January 2003 | San Jose, CA, United States

MOEMS and Miniaturized Systems III

27 January 2003 | San Jose, CA, United States

Showing 5 of 38 Conference Committees

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